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Vapor Deposition The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
- Size(mm): 1750(W) x 1585(H) x 750(D)
- Advanced Semi-Auto System
- Optimized for graphene, CNT growth
- Water-cooled end chambers and doors
- Process Temperature: ~1,100℃
- Uniformity of Film Thickness: ≤+-3%
- Testing Uniformity: ≤+-3%
- Movable furnace method is our unique knowhow for fast heating
- fast cooling of the sample
- Standard safety box
You can see the image to the left or right by turning the equipment
Furnace Moving System The Furnace is designed to move back and forth on dual rail system. In addition, precision sensors allow automatic movement on level position. This system allows fast-heating and fast-cooling.
High Quality Graphene
and Other 2D Materials Able to support growth of high quality graphene as well as other 2D materials with safety features.
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Specifications
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Thermal CVD Semi-auto Operation system
End chambers (stainless steel) - water cooled system
Gas control unit ( Mass flow controller) - 3channel standard + 1 spare
340liter/min Oil rotary pump
Pneumatic On/off valve with Down stream Auto pressure control Throttle valve with controller
Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
On-site install and training
Safety Cover (Connected exhaust system)
Safety interlock system(Water / Air)
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Options
Max temp 1500℃ Furnace by SIC source
Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addition total 12channel
Dry vacuum pump ( Scroll / booster / industry)
Gas Safety interlock system for gas leak
RF plasma ( ICP type )
Tungsten filament gas source cracking
Additional Furnace for source evaporation
High Vacuum processing option (Pump/Gauge/valve unit)
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Installation in Fume hood
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Source delivery system ( Bubbler / Gas / Solid )
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System Utility ( Chiller / scrubber / gas cabinet )
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System Program ( Auto processing system)
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Consumable Parts
K-type Thermocouple (Option : R-type)
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
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Facility Requirements
Electrical power 220VAC 1ph 30A (35A for +1 furnace) Compressed air 0.5~0.6Mpa Compressed air input size 6 mm one touch fitting Cooling water in/out 3/8" lok fitting Cooling water pressure 0.1~0.2Mpa Safety exhaust size 6 mm one touch tube Gas input pressure 40psi Gas port 4ch standard (Option 2ch Extension) Gas port size 1/4"lok fitting Pump exhaust NW25 Rotary pump capacity 340liter/min Vent 1/4"lok fitting -
Layout
Customer List
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Micro Photonics
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UCLA
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Harvard University
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KAUST
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Oxford University
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NTNU Nano Lab
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University of Texas
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CNR IMIP of Bari
University Lab -
Cambridge
University Lab -
Columbia
University Lab
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Standard Warranty
Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.
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Delivery Time & Shipping Policy
The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.
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Equipment Purchasing Process
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1
Request Quote
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2
Confirm Quote Details with Purchase Order
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3
Invoice / Payment
Send Invoice and Payment information
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4
System Production Initiated with Down Payment
Training program offered
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5
Equipment Operation Test / Export packaging & shipment
Upon completion of system production, factory operation test performed.
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6
Express Air Shipment & Delivery
Estimated delivery
– 4 business days
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1
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FAQ
Construction...