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Vapor Deposition The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
- Size (mm) : 1500(W) x 893(H) x 590(D)
- Economic & space-saving model.
- Optimized for graphene, CNT, h-BN TMDC growth.
- Water-cooled end chambers and doors.
- Process Temperature : ~1,100℃
- Protective design from heat
- Uniformity of Film Thickness : ≤+-3%
- Testing Uniformity : ≤+-3%
- Movable furnace method is our unique knowhow for fast heating fast cooling of the sample.
You can see the image to the left or right by turning the equipment
with limited budget.
CVD System The TCVD-50B is the best option for those researchers with limited budget. Able to produce high quality graphene.
Multiple Options TCVD-50B is a reliable and practical model. Able to adapt to user’s requirements.
- Specifications
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TCVD Semi-auto operation system
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End chambers(stainless steel) -water cooled system
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Gas control unit ( Mass flow controller - 3channel standard +1 spare
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340liter/min oil rotary pump
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Pneumatic on/off valve with down stream auto pressure control throttle valve with controller
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Programmable temperature controller
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High temperature furnace(Max1200℃)
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Rapid cooling system by furnace moving
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Atmospheric and vacuum processing
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Anti-contamination system by inner tube
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Vacuum gauge unit(Capacitance/Convectron)
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1 year warranty
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On-site install and training
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Safety unit ( Relief valve )
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- Options
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Max temp 1500℃ furnace by SIC source
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Rapid thermal processing furnace by IR lamp source
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MF power induction heating process max temp 1600℃
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MFC(Mass flow controller) addition
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Dry vacuum pump ( Scroll / booster / industry)
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Auto pressure control throttle valve with controller
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RF plasma ( ICP type )
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Tungsten filament gas source cracking
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Additional furnace for source evaporation
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Fume hood installation
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Source delivery system ( Bubbler / Gas / Solid )
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Thermal CVD semi-auto operation system
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System utility ( Chiller / scrubber / gas cabinet )
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- Consumable Parts
K-type thermocouple (Option : R-type)
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Furnace heating element (Furnace repair)
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Vacuum sensor
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Oil in rotary oil pump
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O-ring
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Quartz tube
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- Facility Requirements
Electrical power 220VAC 1ph 25A (30A for +1 furnace) Cooling water in/out 8 mm one touch fitting Cooling water flow Air temp 5~7liter/min Safety exhaust size 6 mm one touch tube Gas input pressure 40psi Gas port 4ch standard (Option 2ch Extension) Gas port Size 1/4"lok fitting Pump exhaust NW25 Rotary pump capacity 340liter/min Vent Manual handle vent - Layout
Customer List
Boston University 
UCLA
- Standard Warranty
Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.
- Delivery Time & Shipping Policy
The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.
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Equipment Purchasing Process
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1
Request Quote
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2
Confirm Quote Details with Purchase Order
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3
Invoice / Payment
Send Invoice and Payment information
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4
System Production Initiated with Down Payment
Training program offered
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5
Equipment Operation Test / Export packaging & shipment
Upon completion of system production, factory operation test performed.
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6
Express Air Shipment & Delivery
Estimated delivery
– 4 business days
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FAQ
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