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Thermal Chemical
Vapor Deposition
The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
  • Size (mm) : 2300(W) x 1770(H) x 750(D)
  • Up to 10 gases 3 MO sources for gas-phase synthesis.
  • Motor-controlled movable heater for fast heating cooling (patented).
  • Fully computer-controlled programmable recipes.
  • TCVD100 platform : Proven performance for ~100 systems for more than 5 years.
  • Invited training for full sample preparation processes.
  • *Price will be determined after consultation.
  • (Different customization from the standard parts will affect the overall price.)

You can see the image to the left or right by turning the equipment

    Plasma System Low temperature growth and bulk processing possible.
    Automatic Furnace Moving System The Furnace is designed to move back and forth on dual rail system. In addition, precision sensors allow automatic movement on level position. This system allows fast-heating and fast-cooling.
    Smart System 12” Dual-core performance PC system. Able to control remotely.
    Safety Cabinet, Emergency Shut-off system The safety cabinet is a total enclosure for the system with an emergency shut-off button. It can protect the user(s) in dangerous situations.
    Able to Produce High Quality Graphene and Other 2D Materials Able to support growth of high quality graphene as well as other 2D materials with safety features.
      • Specifications
        1. Thermal CVD Semi-auto Operation system

        2. Both End chamber(Stainess) - All parts cooling by water

        3. Quartz Main chamber

        4. Gas control unit ( Mass flow controller) - 3channel standard

        5. 340liter/min Oil rotary pump

        6. Pneumatic On/off valve with Auto pressure control Throttle valve

        7. Programmable Temperature controller

        8. High Temperature Furnace(Max1200℃)

        9. Rapid Cooling system by furnace moving

        10. Atmospheric and Vacuum Processing

        11. Anti-contamination system by inner tube

        12. Vacuum gauge unit(Capacitance/Convectron)

        13. 1 year warranty

        14. On-site install and training

        15. System Program ( Auto processing system)

        16. Safety Cover ( Connected exhaust system )

        17. High Vacuum processing (Pump/Gauge/valve unit)

        18. RF plasma ( ICP type )

      • Options
        1. Max temp 1500℃ Furnace by SIC source

        2. Rapid thermal processing furnace by IR lamp source

        3. MF power induction heating process Max temp 1600℃

        4. MFC(Mass flow controller) addtion total 12channel

        5. Dry vacuum pump ( Scroll / booster / industry)

        6. Safety interlock system(Water / Air/gas leak)

        7. Tungsten filament gas source cracking

        8. Additional Furnace for source evaporation

        9. High Vacuum processing option (Pump/Gauge/valve unit)

        10. Source delivery system ( Bubbler / Gas / Solid )

        11. System Utility ( Chiller / scrubber / gas cabinet )

      • Consumable Parts
        1. K-type Thermocouple (Option : R-type)

        2. Furnace heating element (Furnace repair)

        3. Vacuum sensor

        4. Oil in Rotary Oil Pump

        5. O-ring

        6. Quartz tube

    • Facility Requirements
      Electrical power 220VAC 1ph 40A
      Compressed air 0.5~0.6Mpa
      Compressed air input size 6 mm one touch fitting
      Cooling water in/out 3/8" lok fitting
      cooling water flow Air temp 5~7liter/min
      cooling water pressure 0.1~0.2Mpa
      Safety exhaust size 6 mm one touch tube
      Gas input pressure 40psi
      Gas port 10ch standard (Option 2ch Expansion)
      Gas port Size 1/4"lok fitting
      Pump exhaust NW25
      Rotary pump capacity 340liter/min
      Vent 1/4"lok fitting
      Dry pump exhaust NW16
      Dry pump capacity 250liter/min
      Cold trap LN2 port NW16
    • Layout

    Customer List

    • ETH IBM Lab ETH IBM Lab
    • Standard Warranty

      Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.

    • Delivery Time & Shipping Policy

      The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.

    • Equipment Purchasing Process
      • 1
        Request Quote

      • 2
        Confirm Quote Details with Purchase Order
      • 3
        Invoice / Payment

        Send Invoice and Payment information

      • 4
        System Production Initiated with Down Payment

        Training program offered

      • 5
        Equipment Operation Test / Export packaging & shipment

        Upon completion of system production, factory operation test performed.

      • 6
        Express Air Shipment & Delivery

        Estimated delivery
        – 4 business days

    • FAQ




    Please email to for sample/equipment inquiries


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