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Vapor Deposition The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
- Size (mm) : 2300(W) x 1770(H) x 750(D)
- Up to 10 gases 3 MO sources for gas-phase synthesis.
- Motor-controlled movable heater for fast heating cooling (patented).
- Fully computer-controlled programmable recipes.
- TCVD100 platform : Proven performance for ~100 systems for more than 5 years.
- Invited training for full sample preparation processes.
- *Price will be determined after consultation.
- (Different customization from the standard parts will affect the overall price.)
You can see the image to the left or right by turning the equipment
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Specifications
Thermal CVD Semi-auto Operation system
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Both End chamber(Stainess) - All parts cooling by water
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Quartz Main chamber
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Gas control unit ( Mass flow controller) - 3channel standard
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340liter/min Oil rotary pump
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Pneumatic On/off valve with Auto pressure control Throttle valve
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Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
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Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
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Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
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On-site install and training
System Program ( Auto processing system)
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Safety Cover ( Connected exhaust system )
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High Vacuum processing (Pump/Gauge/valve unit)
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RF plasma ( ICP type )
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Options
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Max temp 1500℃ Furnace by SIC source
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Rapid thermal processing furnace by IR lamp source
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MF power induction heating process Max temp 1600℃
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MFC(Mass flow controller) addtion total 12channel
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Dry vacuum pump ( Scroll / booster / industry)
Safety interlock system(Water / Air/gas leak)
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Tungsten filament gas source cracking
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Additional Furnace for source evaporation
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High Vacuum processing option (Pump/Gauge/valve unit)
Source delivery system ( Bubbler / Gas / Solid )
System Utility ( Chiller / scrubber / gas cabinet )
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Consumable Parts
K-type Thermocouple (Option : R-type)
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
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Specifications
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Facility Requirements
Electrical power 220VAC 1ph 40A Compressed air 0.5~0.6Mpa Compressed air input size 6 mm one touch fitting Cooling water in/out 3/8" lok fitting cooling water flow Air temp 5~7liter/min cooling water pressure 0.1~0.2Mpa Safety exhaust size 6 mm one touch tube Gas input pressure 40psi Gas port 10ch standard (Option 2ch Expansion) Gas port Size 1/4"lok fitting Pump exhaust NW25 Rotary pump capacity 340liter/min Vent 1/4"lok fitting Dry pump exhaust NW16 Dry pump capacity 250liter/min Cold trap LN2 port NW16 -
Layout
Customer List
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ETH IBM Lab
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Standard Warranty
Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.
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Delivery Time & Shipping Policy
The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.
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Equipment Purchasing Process
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1
Request Quote
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2
Confirm Quote Details with Purchase Order
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3
Invoice / Payment
Send Invoice and Payment information
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4
System Production Initiated with Down Payment
Training program offered
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5
Equipment Operation Test / Export packaging & shipment
Upon completion of system production, factory operation test performed.
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6
Express Air Shipment & Delivery
Estimated delivery
– 4 business days
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FAQ
Construction...