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Vapor Deposition The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
- Size (mm) : 2300(W) x 1770(H) x 750(D)
- Advanced Computer Controlled Automatic System
- Optimized for graphene, CNT, h-BN TMDC growth
- Water-cooled end chambers and doors
- Process Temperature: ~1,100 ℃
- Uniformity of Film Thickness : ≤+-3%
- Testing Uniformity : ≤+-3%
- Movable furnace method is our unique knowhow for fast heating fast cooling of the sample.
You can see the image to the left or right by turning the equipment
Shut-off System(Option) The safety cabinet is a total enclosure for the system with an emergency shut-off button. It can protect the user(s) in dangerous situations.
High Quality Graphene
and Other 2D Materials Able to support growth of high quality
graphene as well as other 2D materials with
safety features.
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Standard features
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Thermal CVD Auto Operation system
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Both End chamber(Stainess) - All parts cooling by water
Quartz Main chamber
Gas control unit ( Mass flow controller) - 3channel standard
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340liter/min Oil rotary pump
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Pneumatic On/off valve with Down stream Auto pressure control Throttle valve
with controller -
Programmable Temperature controller
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High Temperature Furnace(Max1200℃)
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Rapid Cooling system by furnace moving
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Atmospheric and Vacuum Processing
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Anti-contamination system by inner tube
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Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
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On-site install and training
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System Program ( Auto processing system)
Furnace for source evaporation
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Safety interlock system(Water / Air)
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Options
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Max temp 1500℃ Furnace by SIC source
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Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addition total 12channel
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Dry vacuum pump ( Scroll / booster / industry)
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Gas Safety interlock system for gas leak
RF plasma ( ICP type )
Tungsten filament gas source cracking
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High Vacuum processing option
(Pump/Gauge/valve unit) -
Source delivery system ( Bubbler / Gas / Solid )
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System Utility ( Chiller / scrubber / gas cabinet )
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Consumable parts
K-type Thermocouple (Option : R-type)
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
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Standard features
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Facility requirements
Construction...
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Layout
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Standard Warranty
Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.
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Delivery Time & Shipping Policy
The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.
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Equipment Purchasing Process
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1
Request Quote
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2
Confirm Quote Details with Purchase Order
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3
Invoice / Payment
Send Invoice and Payment information
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4
System Production Initiated with Down Payment
Training program offered
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5
Equipment Operation Test / Export packaging & shipment
Upon completion of system production, factory operation test performed.
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6
Express Air Shipment & Delivery
Estimated delivery
– 4 business days
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FAQ
Construction...