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- CCP / PECVD
- Anisotropic Etching Characteristics
- Fine machining performance
- Accelerated by the DC BIAS
- W / F and AWLL surface DAMAGE
- Metal contamination, P / T, E / R Low
- Temperature cooling
You can see the image to the left or right by turning the equipment
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Specifications
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Chamber Unit
Material : Stainness304 - Chamber size : (Optional)
- Top shower head(Switched bias)
- ¼”VCR vent port
- Window port (I.D40mm)
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Pumping Unit(Gauge)
- MKS NW40 Auto pressure control valve with
- Controller
- 600l/m Rotary pump
- Capacitance gauge(10torr NW16)
- ATM sensor
- Option : High Vacuum unit Turbo pump(magnet type/Full range
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Chamber Unit
- Material : Hard Anodizing Al with Ceramic insulator
- 600watt RF power with Matching box
- Water cooling
- Max Sample size : 6inch
- Option : Up/down / Heating - 400℃
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Pumping Unit(Gauge)
- MKS Ar/O2/SF6 Mass flow controller
- On/off Diaphram valve unit
- Option : 2channel addition Gas leak sensor
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Gas Showerhead Unit
- Material : Hard Anodizing Aluminum with insulator
- ¼”VCR Gas input port
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Control Unit
- 15inch Touch pa.nel control
- System reciepe
- Interlock (Water/Pneumatic air)
- Data loading
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Consumable Parts
Vacuum sensor- Oil in Rotary Oil Pump
- O-ring
- Window
- Pump
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Facility Requirements
Electrical power 220VAC 1ph 30A Compressed air 0.5~0.6Mpa Compressed air input size 6 mm one touch fitting Cooling water in/out 3/8" lok fitting (ø10) cooling water flow Air temp 5~7liter/min cooling water pressure 0.1~0.2Mpa Safety exhaust size Gas input pressure 40psi Gas port 4ch standard (Option 2ch Expansion) Gas port Size 1/4"VCR fitting Pump exhaust NW40 Rotary pump capacity 550liter/min(formblin) Vent 1/4"lok fitting Dry pump exhaust RF 600watt -
Layout
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Standard Warranty
Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.
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Delivery Time & Shipping Policy
The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.
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Equipment Purchasing Process
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1
Request Quote
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2
Confirm Quote Details with Purchase Order
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3
Invoice / Payment
Send Invoice and Payment information
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4
System Production Initiated with Down Payment
Training program offered
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5
Equipment Operation Test / Export packaging & shipment
Upon completion of system production, factory operation test performed.
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6
Express Air Shipment & Delivery
Estimated delivery
– 4 business days
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FAQ
Construction...