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Reactive Ion Etcher
Determined after consultation Add to cart Quote request
  • Anisotropic Etching Characteristics
  • Fine machining performance
  • Accelerated by the DC BIAS
  • W / F and AWLL surface DAMAGE
  • Metal contamination, P / T, E / R Low
  • Temperature cooling

You can see the image to the left or right by turning the equipment

    • Specifications
        Chamber Unit
      • Material : Stainness304
      • Chamber size : (Optional)
      • Top shower head(Switched bias)
      • ¼”VCR vent port
      • Window port (I.D40mm)
        Pumping Unit(Gauge)
      • MKS NW40 Auto pressure control valve with
      • Controller
      • 600l/m Rotary pump
      • Capacitance gauge(10torr NW16)
      • ATM sensor
      • Option : High Vacuum unit Turbo pump(magnet type/Full range
        Chamber Unit
      • Material : Hard Anodizing Al with Ceramic insulator
      • 600watt RF power with Matching box
      • Water cooling
      • Max Sample size : 6inch
      • Option : Up/down / Heating - 400℃
        Pumping Unit(Gauge)
      • MKS Ar/O2/SF6 Mass flow controller
      • On/off Diaphram valve unit
      • Option : 2channel addition Gas leak sensor
        Gas Showerhead Unit
      • Material : Hard Anodizing Aluminum with insulator
      • ¼”VCR Gas input port
        Control Unit
      • 15inch Touch pa.nel control
      • System reciepe
      • Interlock (Water/Pneumatic air)
      • Data loading
        Consumable Parts
      • Vacuum sensor
      • Oil in Rotary Oil Pump
      • O-ring
      • Window
      • Pump
    • Facility Requirements
      Electrical power 220VAC 1ph 30A
      Compressed air 0.5~0.6Mpa
      Compressed air input size 6 mm one touch fitting
      Cooling water in/out 3/8" lok fitting (ø10)
      cooling water flow Air temp 5~7liter/min
      cooling water pressure 0.1~0.2Mpa
      Safety exhaust size
      Gas input pressure 40psi
      Gas port 4ch standard (Option 2ch Expansion)
      Gas port Size 1/4"VCR fitting
      Pump exhaust NW40
      Rotary pump capacity 550liter/min(formblin)
      Vent 1/4"lok fitting
      Dry pump exhaust RF 600watt
    • Layout

    • Standard Warranty

      Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.

    • Delivery Time & Shipping Policy

      The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.

    • Equipment Purchasing Process
      • 1
        Request Quote

      • 2
        Confirm Quote Details with Purchase Order
      • 3
        Invoice / Payment

        Send Invoice and Payment information

      • 4
        System Production Initiated with Down Payment

        Training program offered

      • 5
        Equipment Operation Test / Export packaging & shipment

        Upon completion of system production, factory operation test performed.

      • 6
        Express Air Shipment & Delivery

        Estimated delivery
        – 4 business days

    • FAQ




    Please email to for sample/equipment inquiries


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