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- Compact, space-saving design
- Rate & thickness control
- Source & substrate shutters
- Multi-source organic evaporation
- Ergonomic to operate, easy to clean
- Compatible with most standard deposition sources
- Configured for your application
You can see the image to the left or right by turning the equipment
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Specifications
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Chamber Unit
Material : Stainness304 / Aluminum- Chamber size : 450x450x600
- Front Open Door with Window(shutter)
- ¼”VCR vent port
- Pumping port/gauge/spare port
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Pumping Unit(Gauge)
- Osaka turbo pump 1100l/s ISO200
- inlet flange
- 600l/m Rotary pump
- Ion gauge/convection gauge
- ATM sensor Option : Load-lock unit/Cryo pump
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Substrate Unit
- Material : Inconel600(High temp)
- Water cooling stage : OFHC
- Max Sample size : 6inch
- Option : Up/down / Heating Max temp 400C/Rotation by motor/Bias for Cleaning
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Control Unit
- System Manual operation
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Option : Semi-auto Operation system
· 15inch Touch panel control
· System reciepe
· Interlock(Water/Pneumatic air)
· Data loading
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E-beam evaporator Unit
- E-beam Power supply 6kW with Sweep controller / Remote control unit
- E-Gun Boat(1~6 multi pocket capacity : 4~7cc)
- W, Mo source evaporation boat install
- Max current 300A( Electrical rod - cooling)
- Pneumatic shutter for source
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Consumable Parts
W-boat- thickness sensor
- Vacuum sensor
- Oil in Rotary Oil Pump
- O-ring
- Window
- Heating module
- Crucible
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Facility Requirements
Electrical power 220VAC 3ph 50A Compressed air 0.5~0.6Mpa Compressed air input size 6 mm one touch fitting Cooling water in/out 1/2" lok fitting (ø16) cooling water flow Air temp 10liter/min cooling water pressure 0.1~0.2Mpa Pump exhaust NW40 Rotary pump capacity 550liter/min Dry pump exhaust Power thermal 2channel Dry pump capacity E-beam 4cc 4channel -
Layout
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Standard Warranty
Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.
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Delivery Time & Shipping Policy
The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.
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Equipment Purchasing Process
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1
Request Quote
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2
Confirm Quote Details with Purchase Order
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3
Invoice / Payment
Send Invoice and Payment information
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4
System Production Initiated with Down Payment
Training program offered
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5
Equipment Operation Test / Export packaging & shipment
Upon completion of system production, factory operation test performed.
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6
Express Air Shipment & Delivery
Estimated delivery
– 4 business days
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FAQ
Construction...